SCIENTIA SINICA Informationis, Volume 48 , Issue 6 : 670-687(2018) https://doi.org/10.1360/N112018-00084

Transfer techniques for single-crystal silicon/germanium nanomembranes and their application in flexible electronics

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  • ReceivedApr 10, 2018
  • AcceptedApr 20, 2018
  • PublishedJun 12, 2018


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  • Figure 1

    (Color online) Unique properties and applications of nanomembranes. (a) Quantumconfinement effect in silicon nanomembrane leads to splitting of theconduction band valleys [9]@Copyright 2010 American Chemical Society. (b)$I_{\rm~DS}$-$V_{\rm~DS}$ properties of the rough Si nanomembrane in the dark andunder light illumination. The inset displays the atomic force microscope image of a rough silicon nanomembrane [10]@Copyright 2009 American Chemical Society. (c)Vertical-cavity surface-emitting laser device with stacked siliconnanomembranes and InGaAsP quantum well active layer [11]@Copyright 2012 Macmillan Publishers Limited. (d) Optical and sanning electron microscopy images ofthe Si nanomembrane thermal detectors [12]@Copyright 2018 AIP Publishing LLC

  • Figure 2

    (Color online) Transfer first, device-last process and typical applications.(a) Release and transfer nanomembrane in solution (wet process). (b) Transfernanomembrane by elastomeric stamp (dry process). (c) A metal grid with asilicon nanomembrane by wet process [48]@2016 Macmillan Publishers Ltd. (d) Asilicon nanomembrane covered on an optical fiber for leakage detection [49]@Copyright 2017 American Chemical Society. (e) Silicon nanomembrane field-effecttransistor fabricated with dry process [50]@Copyright 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.(f) Structure scheme and optical image of germanium nanomembrane wrinklephotodetectors [51]@Copyright 2016 IEEE

  • Figure 3

    (Color online) Nanomembrane device system. (a) Optical image of siliconnanomembrane electrocorticography system (left) and recorded brain wave of amouse (right) [65]@Copyright 2016 Macmillan Publishers Limited. (b) Schematic illustrationof silicon nanomembrane hemispherical electronic eye systems (left) and highresolution image acquired by this system matching the concave hemisphericalsurface of focal plane array [66]@Copyright 2017 The Authors

  • Figure 4

    (Color online) Device-first, transfer-last process and typical applications.(a) Thinning down process of flexible nanomembrane devices on wafer.(b) Optical image of flexible silicon nanomembrane field-effect transistorfabricated with device-first process. (c) Optical image of flexible siliconnanomembrane sensing system with 396 nodes for electrophysiological mapping [93]@Copyright 2017 Macmillan Publishers Limited, part of Springer Nature

  • Figure 5

    (Color online) 3D integrated nanomembranes and circuit system. (a) Si/Genanoribbons van der Waals heterojunctions and its electronic property.Inset, transmission electron microscope image [96]@Copyright 2015 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim. (b) 3D stacked silicon nanomembrane logic circuitsystem on thin sheet of poly(lactic-co-glycolic acid) [97]@Copyright 2015 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim