SCIENTIA SINICA Informationis, Volume 46 , Issue 11 : 1662-1675(2016) https://doi.org/10.1360/N112016-00082

A TDC-based method for nano-scale displacement measurement and its error analysis

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  • ReceivedApr 7, 2016
  • AcceptedJul 1, 2016
  • PublishedNov 4, 2016


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