SCIENCE CHINA Information Sciences, Volume 63 , Issue 11 : 212401(2020) https://doi.org/10.1007/s11432-019-2662-x

Kerr frequency comb with varying FSR spacing based on Si$_3$N$_4$ micro-resonator

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  • ReceivedMay 10, 2019
  • AcceptedSep 2, 2019
  • PublishedJun 28, 2020



This work was supported by National Natural Science Foundation of China (Grant Nos. 61335002, 11574102, 61675084, 61775094) and National High Technology Research and Development Program of China (Grant No. 2015AA016904).


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  • Figure 1

    (Color online) Dispersion simulations for the fundamental TE mode of a Si$_3$N$_4$ waveguide with a height of 800 nm and widths of 1500 and 2000 nm. Insets are the modal power profiles at 1550 nm wavelength.

  • Figure 2

    (Color online) (a) The experimental setup for combs generation. (b) The transmission spectrum of the Si$_3$N$_4$ micro-resonator with a cross section of 800–2000 nm. (c) The quality factor of the micro-resonator. (d) Optical frequency combs spectra generated in the Si$_3$N$_4$ micro-resonator. The inset shows the top view of the Si$_3$N$_4$ micro-ring resonator with a height of 800 nm and a width of 2000 nm.

  • Figure 3

    (Color online) (a) The transmission spectrum of the Si$_3$N$_4$ micro-resonator with a cross section of 800 nm$\times$1500 nm. (b) The quality factor of the micro-resonator is 8.24$\times$10$^5$. (c)–(f) Evolution of the frequency comb as the wavelength is gradually tuned to the resonant wavelength from a micro-ring with a cross section of 800 nm$\times$ protectłinebreak 1500 nm. When the wavelength approaches the resonance, peaks start to appear with fourteen FSRs spacing, as shown in (c). Secondary lines gradually fill in the spectral gaps when the wavelength becomes closer to the resonance and FSRs spacing decreases to one FSR as observed in (d)–(f).

  • Figure 4

    (Color online) (a) Experimental setup for combs generation with feedback loop. The inset shows the micro-resonator formed by 800 nm$\times$1500 nm Si$_3$N$_4$ waveguides. (b)–(d) Spectra of the combs with flexible FSR spacing. (b) 2-FSRs, (c) 4-FSRs, (d) 6-FSRs.