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This work was supported in part by National Natural Science Foundation of China (Grant Nos. 91848206, U1613212), in part funded by National Natural Science Foundation of China (Grant Nos. 61621136008/DFG TRR-169, 61503212, 61803267), and Suzhou Special Program (Grand No. 2016SZ0219).
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Figure 1
(Color online) Multi-modal tactile sensor. (a) The sensor structure and (b) the sensor prototype.