SCIENCE CHINA Information Sciences, Volume 62 , Issue 8 : 089201(2019) https://doi.org/10.1007/s11432-018-9593-1

Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes

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  • ReceivedMay 16, 2018
  • AcceptedJul 16, 2018
  • PublishedJan 15, 2019


There is no abstract available for this article.


This work was supported by National Natural Science Foundation of China (Grant Nos. 61603303, 61803309, 61573365, 61833016), Natural Science Basic Research Program of Shaanxi (Grant No. 2017JQ6005), Fundamental Research Funds for the Central Universities (Grant No. G2017KY0008), and Innovation Development Foundation of Loving Students (Grant No. ASNIF2015-1502).


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