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This work was supported by Beijing Nova Program (Grant No. xx2016B027).
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| MeanAbs | MaxAbs | STD | Time (s) | |
| Pre-compensation | 0.5387$^\circ$ | 1.4654$^\circ$ | 0.4610$^\circ$ | |
| LSE | 0.3919$^\circ$ | 0.9796$^\circ$ | 0.4607$^\circ$ | |
| BP-net | 0.0747$^\circ$ | 0.2770$^\circ$ | 0.0876$^\circ$ | 44.00 |
| FNN | 0.0732$^\circ$ | 0.3281$^\circ$ | 0.0864$^\circ$ | 40.60 |
| WDD-FNN | 1.57 |
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